(SNL-CA), Livermore, CA (United States) Energy Frontier Research Centers (EFRC) (United States). Publication Date: Mon Apr 10 00:00: Research Org.: Sandia National Lab. American Society for Engineering Education, Washington, DC (United States).Johns Hopkins Univ., Laurel, MD (United States).of Maryland, College Park, MD (United States). Finally, we show an additional application of the moderate-temperature ALD process by demonstrating a flexible solid state battery fabricated on a polymer substrate. The high quality of the ALD growth process allows pinhole-free deposition even on rough crystalline surfaces, and we demonstrate the fabrication and operation of thin film batteries with the thinnest (<40nm) solid more » state electrolytes yet reported.
#Solid state battery overview full
We demonstrate the viability of the ALD-grown electrolyte by integrating it into full solid state batteries, including thin film devices using LiCoO 2 as the cathode and Si as the anode operating at up to 1 mA/cm 2. Films grown at 300☌ have an ionic conductivity of (6.51 ± 0.36)×10 -7 S/cm at 35☌, and are functionally electrochemically stable in the window from 0 to 5.3V vs. The P/N ratio of the films is always 1, indicative of a particular polymorph of LiPON which closely resembles a polyphosphazene. The reaction between lithium tert-butoxide (LiO tBu) and diethyl phosphoramidate (DEPA) produces conformal, ionically conductive thin films with a stoichiometry close to Li 2PO 2N between 250 and 300☌. We describe an atomic layer deposition (ALD) process for a member of the lithium phosphorus oxynitride (LiPON) family, which is employed as a thin film lithium-conducting solid electrolyte. Several active areas of research in novel energy storage technologies, including three-dimensional solid state batteries and passivation coatings for reactive battery electrode components, require conformal solid state electrolytes.